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:: ½ÃÇ迬±¸¿ë ::::::::::
¿ëµµ
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¹ÙÅÁ°¡½º
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¼ººÐ°¡½º ¹× ³óµµ
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Ç¥¸éÀû ÃøÁ¤¿ë
|
He
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N2
|
30% (±1%)
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½Ä¹°¼ºÀ忬±¸¿ë
|
N2
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CO2
|
340ppm - 480ppm
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N2
|
C2H4
|
50ppm - 60ppm
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O2
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20% - 21%
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N2
|
H2
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5%
|
Ã˸ÅÈ°¼º¿¬±¸¿ë
|
He
|
H2
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20ppm - 200ppm
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CO
|
10ppm - 100ppm
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CO2
|
2ppm
|
CH4
|
5ppm
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N2
|
VO
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20% - 40%
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N2
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H2
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30% - 70%
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H2
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CO
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30% - 50%
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H2
|
CO
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30% - 40%
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N2
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5% - 15%
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